Large-area Co-silicide nanodot arrays produced by colloidal nanosphere lithography and thermal annealing

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Title:	Large-area Co-silicide nanodot arrays produced by colloidal nanosphere lithography and thermal annealing
Authors:	Cheng,S. L.;Wong,S. L.;Lu,S. W.;Chen,H.
Contributors:	材料科學與工程研究所
Keywords:	THIN-FILMS;FABRICATION;COSI2;GROWTH;NANOSTRUCTURES;NANOPARTICLE
Date:	2008
Issue Date:	2010-07-06 15:57:55 (UTC+8)
Publisher:	中央大學
Abstract:	We report here the Successful fabrication of large-area size-tunable periodic arrays of cobalt and Co-silicide nanodots on silicon Substrates by employing the colloidal nanosphere lithography (NSL) technique and heat treatments. The growth of low-resistiv
Relation:	ULTRAMICROSCOPY???
Appears in Collections:	[Institute of Materials Science and Engineering] journal & Dissertation

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