Electrical and optical properties of TiO2-doped ZnO films prepared by radio-frequency magnetron sputtering

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题名:	Electrical and optical properties of TiO2-doped ZnO films prepared by radio-frequency magnetron sputtering
作者:	Chung,Jeng-Lin;Chen,Jyh-Chen;Tseng,Chung-Jen
贡献者:	機械工程研究所
关键词:	ZINC-OXIDE-FILMS;CHEMICAL-VAPOR-DEPOSITION;THIN-FILMS;RF;CONDUCTION;BAND;TI
日期:	2008
上传时间:	2010-07-06 16:16:32 (UTC+8)
出版者:	中央大學
摘要:	TiO2-doped zinc oxide (ZnO) films were prepared by radio frequency (RF) magnetron sputtering in argon gas. The electrical and optical properties in the TiO2-doped ZnO films as functions of the TiO2 content were investigated. It was observed that the (002)
關聯:	JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS?
显示于类别:	[機械工程研究所] 期刊論文

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