In situ sensitive optical monitoring with proper error compensation

NCUIR > Research Center > Thin Film Technology Center > journal & Dissertation > Item 987654321/35661

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35661

Title:	In situ sensitive optical monitoring with proper error compensation
Authors:	Lee,Cheng-Chung;Wu,Kai
Contributors:	薄膜技術研究中心
Keywords:	FILTERS
Date:	2007
Issue Date:	2010-07-07 15:47:20 (UTC+8)
Publisher:	中央大學
Abstract:	We introduce a way to estimate the fluctuation of the refractive index during thin film deposition, through an optical monitor. The thicknesses and error-compensated thickness for each layer are analyzed. A novel monitoring method is thereby derived. The
Relation:	OPTICS LETTERS
Appears in Collections:	[Thin Film Technology Center] journal & Dissertation

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