Microstructure related properties of lanthanum fluoride films deposited by molybdenum boat evaporation at 193 nm

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題名:	Microstructure related properties of lanthanum fluoride films deposited by molybdenum boat evaporation at 193 nm
作者:	Liu,MC;Lee,CC;Kaneko,M;Nakahira,K;Takano,Y
貢獻者:	薄膜技術研究中心
關鍵詞:	COATING MATERIALS;OPTICAL COATINGS;THIN-FILMS;ULTRAVIOLET;MGF2;GROWTH;LAF3
日期:	2005
上傳時間:	2010-07-07 15:47:54 (UTC+8)
出版者:	中央大學
摘要:	Single layer lanthanum fluoride (LaF3) at 193 nm was deposited by a molybdenum boat evaporation process. Various microstructures that formed under different substrate temperatures and with deposition rates were investigated. The relation between these mic
關聯:	THIN SOLID FILMS
顯示於類別:	[薄膜技術研究中心] 期刊論文

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