Reflection type heterodyne grating interferometry for in-plane displacement measurement

NCUIR > Engineering College > Graduate Institute of opto-Mechatronics > journal & Dissertation > Item 987654321/36122

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/36122

Title:	Reflection type heterodyne grating interferometry for in-plane displacement measurement
Authors:	Hsu,Cheng-Chih;Wu,Chyan-Chyi;Lee,Ju-Yi;Chen,Hui-Yi;Weng,Han-Fu
Contributors:	光機電工程研究所
Keywords:	HIGH-RESOLUTION;UNCERTAINTY
Date:	2008
Issue Date:	2010-07-08 09:43:19 (UTC+8)
Publisher:	中央大學
Abstract:	A novel method is presented for one-dimensional (I-D) and two-dimensional (2-D) in-plane displacements measurement that is based on the heterodyne grating interferometry. The novel setup of the optical configuration reduces the airstreams disturbance and
Relation:	OPTICS COMMUNICATIONS
Appears in Collections:	[Graduate Institute of opto-Mechatronics] journal & Dissertation

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