Fluorine-doped tin oxide films grown by pulsed direct current magnetron sputtering with an Sn target

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題名:	Fluorine-doped tin oxide films grown by pulsed direct current magnetron sputtering with an Sn target
作者:	Liao,BH;Kuo,CC;Chen,PJ;Lee,CC
貢獻者:	光電科學與工程學系
關鍵詞:	THIN-FILMS;OPTICAL-PROPERTIES;SB
日期:	2011
上傳時間:	2012-03-27 18:16:11 (UTC+8)
出版者:	國立中央大學
摘要:	Fluorine-doped tin oxide (FTO) films have been deposited by pulsed DC magnetron sputtering with an Sn target. Various ratios of CF(4)/O(2) gas were injected to enhance the optical and electrical properties of the films. The extinction coefficient was lower than 1.5 x 10(-3) in the range from 400 to 800 nm when the CF(4)/O(2) ratio was 0.375. The resistivity of fluorine-doped SnO(2) films (1.63 x 10(-3) Omega cm) deposited at 300 degrees C was 27.9 times smaller than that of undoped SnO(2) (4.55 x 10(-2) Omega cm). Finally, an FTO film was consecutively deposited for protecting the oxidation of indium tin oxide films. The resistivity of the double-layered film was 2.68 x 10(-4) Omega cm, which increased by less than 39% at a 450 degrees C annealing temperature for 1 h in air. (C) 2010 Optical Society of America
關聯:	APPLIED OPTICS
顯示於類別:	[光電科學與工程學系] 期刊論文

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