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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/69509

    Title: 迴力棒圖應用於真實量產晶圓圖;Application of Boomerang Chart to Real-World Mass Production Wafer Maps
    Authors: 葉昱緯;Yeh,Yu-Wei
    Contributors: 電機工程學系
    Keywords: 迴力棒;晶圓分析;晶圓良率
    Date: 2016-02-25
    Issue Date: 2016-03-17 20:47:27 (UTC+8)
    Publisher: 國立中央大學
    Abstract: 本篇論文為對已分類之瑕疵晶圓圖,以過去提出之迴力棒特徵圖,將這些晶圓圖瑕疵分佈的均勻性以巨觀的概念做更深入的分析以及驗證。
    ;In this paper, we use Boomerang Chart that we published in the past to analyze the classified wafer maps in a great view, whether the distribution of defects uniform or not and verify it in mass production.
    At first, we choose five kinds of size of wafers that we would like to analyze, and simulate basic curve according to these five kinds of size. In this experiment, we will create parameters NBD and NCD from every wafer in every data, and normalize the two parameters to create two new parameters, NNBD and NNCD. We will create Boomerang Chart according to the two parameters and compare with basic curve to observe every failure type’s position on basic curve, we will judge whether a wafer uniform or not and the situation of clustering of bad dice by this. Then, we will view whether there are systematic errors in non-classified data based on the result.
    In this experiment, we verify mass production by using Boomerang Chart ,and find out the position and the situation of clustering of every failure type by observing Boomerang Chart ,and confirm the practicability of Boomerang Chart through non-classified data set to get the achievement of increasing yield、testing efficiency and reduce the production cost.
    Appears in Collections:[電機工程研究所] 博碩士論文

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