粒子探測器快速自動檢測系統之研發;The Research and Development of Particle Detector Rapid Automatic Inspection System

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题名:	粒子探測器快速自動檢測系統之研發;The Research and Development of Particle Detector Rapid Automatic Inspection System
作者:	張用威;Chang, Yung-Wei
贡献者:	物理學系
关键词:	高粒度量能器;晶圓載台;矽偵測器;多通道檢流計;漏電流量測;HGCal;wafer stage;silicon sensors;multi-readout current meter;leakage current measurement
日期:	2021-06-21
上传时间:	2021-12-07 11:59:48 (UTC+8)
出版者:	國立中央大學
摘要:	本論文針對CMS(緊湊秒子線圈實驗)第二階段升級HGCal(高粒度量能器)之高能矽晶元件進行客製化自動量測整合，此系統用於六至八吋晶圓的半自動化測量，為高能實驗組自行設計、研發、組裝之漏電流/電容電壓量測機，旨在解決特規元件開發與量測上無對應機台可使用的窘境。此系統搭配微米級三軸自動滑台、手動旋轉滑台(可升級為自動滑台)、及可裝載探針卡之手動升降單元，後期開發延伸至多通道皮安培/納安培電流量測計，建立良好且完善的人機介面、操作指引、開發程式庫供小型實驗室/無塵室之學生及雇員使用。此系統雖無法滿足相關市售儀器之生產需求與工業規範，以大程度減低實驗室研究人員手動進行量測造成的誤差及負擔為目標，此系統可滿足各式高能矽晶元件之特殊尺寸與測量需求，未來僅需針對不同的測量條件對機台進行適度調整或改裝，方可再次投入實驗室/無塵室使用，也可整合數位相機與顯微鏡進行影像擷取或晶圓的精密定位。;Exploration of high energy physics hasn′t come to an end yet. The Compact Muon Solenoid (CMS) experiments will undergo an upgrade during Long-Shutdown three. In comparison to the original CMS design, the next generation detector will cover more detailed information and a wide variety of technologies for energy reconstruction. The CMS endcap will be replaced by the High Granularity Calorimeter (HGCal). Hundreds of silicon sensors will have to undergo quality control in dedicated IV and CV scans. The purpose of this thesis is to provide a brief overview to the basic principles of silicon sensors. Then, for time-consuming reason, especially in cases where we need to plan for 128 channels of each sensor, a study of semi-automatic and multi-channel test solution was undertaken by a group of people in NCU HEP. This thesis introduces the method of a rapid automatic inspection system for wafer-level testing of silicon sensors. The system includes a semi-automatic probe station, a probe card assembly which can be setup in both one and several-needle configuration, and a multi-readout current meter for pico/nano range measurement. Such devices may not use for commercial purposes but can meet all aspects of sensor testing during R&D phase. The design is capable of being constructed with other instruments, optical mounts and holders for different applications. A plan that integrates a vision-based alignment system into the probe station has been evaluated.
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