近年來，無鉛鈣鈦礦材料 ( Lead-Free Perovskite ) 由於其簡易製程、無毒、以及壓電性質，已在壓電領域被廣泛研究，其中又以無機鹵素鈣鈦礦 ( Inorganic Halide Perovskite, IHP) 系統最受矚目。然而，傳統水溶液法製備之無機鹵素鈣鈦礦，雖具備高產率以及低溫製程等優點，但其結晶性、化學穩定性、與壓電特性之探討尚未清晰，阻礙其進一步技術發展。本研究中，我們首次使用化學氣相沉積法 ( Chemical Vapor Deposition , CVD ) 來製備高質量的 IHP。我們也藉由原子力顯微鏡技術進一步量測其壓電響應。此外，我們也應用 IHP 於壓電奈米發電機系統設計。此發電機系統不僅具備高靈敏度、自驅動、輕量化等優點，且可相容於織物基材，相信對於未來穿戴式裝置介面設計能帶來新的機會。 ;In recent years, lead-free perovskite materials have been widely studied in the field of piezoelectricity due to their simple fabrication process, non-toxicity, and outstanding piezoelectric properties. Among them, the Inorganic Halide Perovskite (IHP) system has attracted the most attention. However, traditional solution methods to produce IHPs still suffer from low crystallinity, chemical instability, and unclear origin of the intrinsic piezoelectricity, which hinder further their development. In this study, we utilized Chemical Vapor Deposition (CVD) to fabricate high-quality IHP. By using Piezoelectric Force Microscopy (PFM) to measure the piezoelectric response, the piezoelectricity of the IHP was confirmed. Additionally, we designed a piezoelectric nanogenerator system based on the derived IHP. This generator system not only possesses high sensitivity, self-driving capability, and lightweight, but also compatible with textile substrates. We believe it can bring new opportunities for future wearable devices.
