本研究採用離子助鍍電子槍蒸鍍系統來鍍製氧化釔(Y2O3)、釔鋁石榴石(YAG)及釔鋁石榴石(YAG)摻雜稀土元素材料，調整不同離子源電壓參數鍍製抗腐蝕薄膜，透過微波電漿蝕刻(CF4/O2/Ar)後找出其最佳抗電漿腐蝕薄膜以及其參數。 經過微波電漿蝕刻機固定微波功率及氣體比例蝕刻兩個小時後，從XPS分析可知氧化釔(Y2O3)、釔鋁石榴石(YAG)及釔鋁石榴石(YAG)摻雜稀土元素材料在不同離子源電壓時有不同的Y-F濃度，當有較高的Y-F濃度時有較好的擴散速率。在經過長時間的蝕刻又以YAG 摻雜稀土元素最為抗電漿腐蝕。 從FIB圖可以發現蝕刻兩個小時後氧化釔(Y2O3)、釔鋁石榴石(YAG)及釔鋁石榴石(YAG)摻雜稀土元素材料時有較慢的生長速率，分別為0.00713 Å/s、0.0667 Å/s及0.0045 Å/s，經過長時間蝕刻後也是YAG 摻雜稀土元素之生長速率趨於穩定。經過OM的觀察也可以發現YAG 摻雜稀土元素膜面經過長時間蝕刻後有較少微粒汙染。 YAG 摻雜擁有不錯的氟擴散速率表示其生成鈍化層的品質較佳，以及經過長時間蝕刻可以更快速的達到穩定減緩其生長速率，並且微粒汙染較少，因此YAG 摻雜之抗電漿腐蝕能力最為出色。 ;This study utilized an ion-assisted deposition electron gun evaporation system to fabricate yttrium oxide (Y2O3), yttrium aluminum garnet (YAG), and rare-earth-doped yttrium aluminum garnet (YAG) materials. Corrosion-resistant films were produced by adjusting various ion source voltage parameters. The optimal plasma corrosion-resistant film and its parameters were identified through microwave plasma etching (CF4/O2/Ar). After etching for two hours with a fixed microwave power and gas ratio in the microwave plasma etcher, XPS analysis revealed different Y-F concentrations in yttrium oxide (Y2O3), yttrium aluminum garnet (YAG), and rare-earth-doped yttrium aluminum garnet (YAG) under different ion source voltages. Higher Y-F concentrations were associated with better diffusion rates. Among these, rare-earth-doped YAG exhibited the highest resistance to plasma corrosion after prolonged etching. FIB images indicated that after two hours of etching, yttrium oxide (Y2O3), yttrium aluminum garnet (YAG), and rare-earth-doped yttrium aluminum garnet (YAG) showed slower growth rates of 0.00713 Å/s, 0.0667 Å/s, and 0.0045 Å/s, respectively. Prolonged etching also stabilized the growth rate of rare-earth-doped YAG. Observations from OM revealed that the surface of the rare-earth-doped YAG film had fewer particulate contaminants after extended etching. The enhanced fluorine diffusion rate in doped YAG suggests the formation of a superior passivation layer. Prolonged etching leads to a more stable and reduced growth rate, coupled with fewer particulate contaminants. Consequently, rare earth element-doped YAG demonstrates exceptional plasma corrosion resistance.
