| 摘要: | 隨著光通訊與量子光學技術的快速發展，矽光子平台因其高度整合性與製程相容性，成為未來光電元件設計的重要趨勢。本研究以氮化矽微環形諧振器為核心，針對非線性系統應用進行結構設計優化，並結合製程開發與實驗驗證，探討高效能矽光子元件之可行性。
為了增強環形諧振器的性能，在高限制波導透過滑輪耦合角度設計，於10度角達到最佳耦合成果，實現本質品質因子達9.99×104，並以螺旋結構量測不同長度確立傳輸損耗約為3.88 dB/cm。於低限制波導設計中利用4 µm氧化矽絕緣層，成功實現品質因子高達5.55×105與傳輸損耗僅2.18 dB/cm，展現了其於高能量非線性應用中的潛力。
進一步整合串聯馬赫-曾德干涉器與環形諧振器之複合式結構，成功實現高消光比濾波器(>35 dB)於無需外部調變情況下穩定運作。此外展現多波長選擇與頻率抑制能力，具備應用於量子計算與光子神經網路平台之應用。此外提出光纖埋入式凹槽設計，改善邊緣耦合穩定性，並達到光纖單邊耦合損耗為5.16 dB，降低背景雜訊干擾並提升封裝整合性，證實其系統穩定性與實用化價值。
本研究已成功建立氮化矽微環形諧振器設計、製程與封裝整合之完整開發流程，對於未來非線性光子學與量子光電應用之發展具備重要參考價值。
;With the rapid development of optical communication and quantum photonics, silicon photonic platforms have become a major trend in optoelectronic device design due to their high integration density and CMOS-compatible fabrication. This research centers on silicon nitride (Si₃N₄) micro-ring resonators, with structural optimizations targeting nonlinear applications. The feasibility of high-performance silicon photonic devices is investigated through integrated design, fabrication processes, and experimental validation.
To enhance resonator performance, pulley coupling was employed in high-confinement waveguides, achieving optimal coupling at a 10-degree angle and an intrinsic quality factor of 9.99 × 10⁴. A spiral structure was used to characterize propagation loss across different lengths, resulting in a measured loss of approximately 3.88 dB/cm. In the low-confinement configuration, a 4 µm SiO₂ insulation layer enabled a high quality factor of 5.55 × 10⁵ with a low transmission loss of 2.18 dB/cm, showing strong potential for high-energy nonlinear applications.
A composite structure integrating a Mach–Zehnder interferometer (MZI) with a micro-ring resonator was demonstrated, achieving a high extinction ratio filter (>35 dB) that operates stably without external modulation. Multi-wavelength selection and frequency suppression were also realized, indicating suitability for quantum computing and photonic neural network systems. Furthermore, a recessed embedded-fiber groove structure was introduced to improve edge coupling stability, achieving a single-sided coupling loss of 5.16 dB. This design also reduced background noise and enhanced packaging integration, validating its system stability and practical applicability.
Overall, a complete development process for Si₃N₄ micro-ring resonator design, fabrication, and packaging has been established, offering valuable insights for future advancements in nonlinear photonics and quantum optoelectronic applications. |
