Patterning Periodical Motif on Substrates Using Monolayer of Microspheres: Application in GaN Light-Emitting Diodes

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/28132

Title:	Patterning Periodical Motif on Substrates Using Monolayer of Microspheres: Application in GaN Light-Emitting Diodes
Authors:	Chan,CH;Hou,CH;Huang,CK;Chen,TJ;Tseng,SZ;Chien,HT;Kuo,CH;Hsieh,KH;Tsai,YL;Hsu,KC;Chen,CC
Contributors:	光電科學研究所
Keywords:	SURFACE;EFFICIENCY
Date:	2009
Issue Date:	2010-06-29 19:42:14 (UTC+8)
Publisher:	中央大學
Abstract:	In this article, we present a method of patterning a GaN substrate using polystyrene spheres and its inversed structure as the mask. By dry etching, different surface morphologies and depths of the GaN substrate can be obtained by changing the etching time. We used such a sphere-patterned GaN substrate to fabricate GaN-based light-emitting diodes (LED). It was found that the total lighting output of the sphere-patterned GaN LED was increased by 37%. (C) 2009 The Japan Society of Applied Physics
Relation:	JAPANESE JOURNAL OF APPLIED PHYSICS
Appears in Collections:	[Graduate Institute of Optics and Photonics] journal & Dissertation

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