Patterning Periodical Motif on Substrates Using Monolayer of Microspheres: Application in GaN Light-Emitting Diodes

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题名:	Patterning Periodical Motif on Substrates Using Monolayer of Microspheres: Application in GaN Light-Emitting Diodes
作者:	Chan,CH;Hou,CH;Huang,CK;Chen,TJ;Tseng,SZ;Chien,HT;Kuo,CH;Hsieh,KH;Tsai,YL;Hsu,KC;Chen,CC
贡献者:	光電科學研究所
关键词:	SURFACE;EFFICIENCY
日期:	2009
上传时间:	2010-06-29 19:42:14 (UTC+8)
出版者:	中央大學
摘要:	In this article, we present a method of patterning a GaN substrate using polystyrene spheres and its inversed structure as the mask. By dry etching, different surface morphologies and depths of the GaN substrate can be obtained by changing the etching time. We used such a sphere-patterned GaN substrate to fabricate GaN-based light-emitting diodes (LED). It was found that the total lighting output of the sphere-patterned GaN LED was increased by 37%. (C) 2009 The Japan Society of Applied Physics
關聯:	JAPANESE JOURNAL OF APPLIED PHYSICS
显示于类别:	[光電科學研究所] 期刊論文

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