Patterning Periodical Motif on Substrates Using Monolayer of Microspheres: Application in GaN Light-Emitting Diodes

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題名:	Patterning Periodical Motif on Substrates Using Monolayer of Microspheres: Application in GaN Light-Emitting Diodes
作者:	Chan,CH;Hou,CH;Huang,CK;Chen,TJ;Tseng,SZ;Chien,HT;Kuo,CH;Hsieh,KH;Tsai,YL;Hsu,KC;Chen,CC
貢獻者:	光電科學研究所
關鍵詞:	SURFACE;EFFICIENCY
日期:	2009
上傳時間:	2010-06-29 19:42:14 (UTC+8)
出版者:	中央大學
摘要:	In this article, we present a method of patterning a GaN substrate using polystyrene spheres and its inversed structure as the mask. By dry etching, different surface morphologies and depths of the GaN substrate can be obtained by changing the etching time. We used such a sphere-patterned GaN substrate to fabricate GaN-based light-emitting diodes (LED). It was found that the total lighting output of the sphere-patterned GaN LED was increased by 37%. (C) 2009 The Japan Society of Applied Physics
關聯:	JAPANESE JOURNAL OF APPLIED PHYSICS
顯示於類別:	[光電科學研究所] 期刊論文

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