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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35402


    Title: Semiconductor hollow optical waveguides formed by omni-directional reflectors
    Authors: Lo,SS;Wang,MS;Chen,CC
    Contributors: 光電科學與工程學系
    Date: 2004
    Issue Date: 2010-07-07 14:13:29 (UTC+8)
    Publisher: 中央大學
    Abstract: In this study, a hollow optical waveguide with omni-directional reflectors in silicon-based materials was design, fabricated and characterized. By using dry etching technique, plasma-enhanced chemical vapor deposition for Si/SiO2 thin films and covering a
    Relation: OPTICS EXPRESS
    Appears in Collections:[光電科學與工程學系] 期刊論文

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