English  |  正體中文  |  简体中文  |  Items with full text/Total items : 68069/68069 (100%)
Visitors : 23151541      Online Users : 219
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version


    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/51034


    Title: GaN Epitaxial Layers Prepared on Nano-Patterned Si(001) Substrate
    Authors: Huang,CC;Chang,SJ;Kuo,CH;Ko,CH;Wann,CH;Cheng,YC;Lin,WJ
    Contributors: 光電科學與工程學系
    Keywords: VAPOR-PHASE EPITAXY;LIGHT-EMITTING-DIODES;GALLIUM NITRIDE;BUFFER LAYERS;CUBIC GAN;SAPPHIRE;GROWTH;FILMS;SI;SILICON
    Date: 2011
    Issue Date: 2012-03-27 18:16:12 (UTC+8)
    Publisher: 國立中央大學
    Abstract: We report the growth of GaN epitaxial layer on Si(001) substrate with nano-patterns prepared by dry etching facility used in integrated circuit (IC) industry. It was found that the GaN epitaxial layer prepared on nano-patterned Si(001) substrate exhibits both cubic and hexagonal phases. It was also found that threading dislocation observed from GaN prepared on nano-patterned Si(001) substrate was significantly smaller than that prepared on conventional unpatterned Si(111) substrate. Furthermore, it was found that we can reduce the tensile stress in GaN epitaxial layer by about 78% using the nano-patterned Si(001) substrate.
    Relation: JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
    Appears in Collections:[光電科學與工程學系] 期刊論文

    Files in This Item:

    File Description SizeFormat
    index.html0KbHTML408View/Open


    All items in NCUIR are protected by copyright, with all rights reserved.

    社群 sharing

    ::: Copyright National Central University. | 國立中央大學圖書館版權所有 | 收藏本站 | 設為首頁 | 最佳瀏覽畫面: 1024*768 | 建站日期:8-24-2009 :::
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback  - 隱私權政策聲明