Deposition of Al-doped and Al, Sc-co-doped zinc oxide films by RF- and DC-sputtering of the ZnO and Al-xSc (x=0, 0.4, 0.8 and 1.7 wt.%) targets

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Title:	Deposition of Al-doped and Al, Sc-co-doped zinc oxide films by RF- and DC-sputtering of the ZnO and Al-xSc (x=0, 0.4, 0.8 and 1.7 wt.%) targets
Authors:	Lin,Jing-Chie;Peng,Kun-Cheng;Tseng,C. A.;Lee,Sheng-Long
Contributors:	材料科學與工程研究所
Keywords:	HIGHLY TRANSPARENT;OPTICAL-PROPERTIES;MAGNETRON
Date:	2008
Issue Date:	2010-07-06 15:57:31 (UTC+8)
Publisher:	中央大學
Abstract:	Innovative films ZnO: Al-xSc (in which x = 0, 0.4, 0.8 and 1.7 wt.%) were prepared through RF-sputtering on the ZnO target and DC-sputtering on the Al-xSc alloy targets. X-ray diffraction (XRD) of the films displayed a hexagonal wurtzite textured at (002)
Relation:	SURFACE & COATINGS TECHNOLOGY????
Appears in Collections:	[Institute of Materials Science and Engineering] journal & Dissertation

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