綠色議題逐漸受到重視,越來越多企業執行綠色供應鏈管理以提升綠色績效。半導體產業存在嚴重的環境問題,能源消耗與溫室氣體排放逐年增加,形成資源耗竭與環境衝擊;而半導體廠商存在緊密的上下游關係與錯綜複雜的供應鏈網絡,故許多半導體廠商執行綠色供應鏈管理以改善環境問題。本研究擬評估2014年至2016年半導體供應鏈綠色績效以檢視半導體產業執行綠色供應鏈管理之成效,採用共同邊界麥氏生產力指數方法 (Metafrontier Malmquist Productivity Index, MMPI),此方法考慮跨期觀點且能進行不同技術組別之間的績效比較,以全球半導體供應鏈廠商作為研究對象,並將廠商分為製造商、封測商與設計商三個組別,分別針對整體供應鏈有考慮環境變數與未考慮環境變數兩種情況下探討績效變化,並比較整體供應鏈與供應鏈各組的年度績效變化以評估半導體供應鏈的績效表現。研究結果顯示考慮環境變數將不影響整體供應鏈績效進步或退步之狀態,故仍鼓勵半導體供應鏈廠商應將綠色納入績效評估以及策略之中。;With the increasing attention on the green issues, more and more enterprises execute green supply chain management to promote green performance. There are serious environment problems in semiconductor industry. Consumption of energy and greenhouse emission have been increasing every year, causing exhaustion of resource and great impacts on environment. Semiconductor companies have close relationships with its upstream and downstream companies and complicated supply chain network; therefore, many semiconductor companies have started using green supply chain management to improve environmental problems. This study aims to evaluate green performance of semiconductor supply chain from 2014 to 2016 so as to examine the effect of the green supply chain management of semiconductor industries. This study uses Metafrontier Malmquist Productivity Index (MMPI) because it considers periods and is able to evaluate performance of groups with different technics. Samples of global semiconductor companies classified into three groups of design, manufacturing, packaging and testing are used as research objects to evaluate variety of performance in condition of considering environment variables and disregarding environment variables respectively and to compare the differences between two conditions of whole supply chain and the performance change among periods of whole supply chain and the groups of the chain. The result of this study discovers that considering environment variables doesn’t influence the consequence of progress or regress of whole supply chain. Nevertheless, this thesis still suggests semiconductor companies taking the green issues into the performance measurement and the strategy of companies.