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Items for Author "Kaneko,M"
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Showing 3 items.
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Date
Title
Authors
Bitstream
[光電科學與工程學系] 期刊論文
2005
Characterization of AlF3 thin films at 193 nm by thermal evaporation
Lee,CC
;
Liu,MC
;
Kaneko,M
;
Nakahira,K
;
Takano,Y
[薄膜技術研究中心] 期刊論文
2005
Influence of thermal annealing and ultraviolet light irradiation on LaF3 thin films at 193 nm
Lee,CC
;
Liu,MC
;
Kaneko,M
;
Nakahira,K
;
Takano,Y
[薄膜技術研究中心] 期刊論文
2005
Microstructure related properties of lanthanum fluoride films deposited by molybdenum boat evaporation at 193 nm
Liu,MC
;
Lee,CC
;
Kaneko,M
;
Nakahira,K
;
Takano,Y
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